ASML Holding
The world's leading supplier of semiconductor lithography systems.
Last updated August 21, 2026
Overview
ASML Holding N.V. is a Dutch multinational semiconductor-equipment company headquartered in Veldhoven. Its principal business is the design, manufacture, sale, and servicing of lithography systems used to print extremely small patterns onto silicon wafers during integrated-circuit production. Lithography is one of the central steps in chip manufacturing, and ASML's systems are integrated into production lines operated by major memory and logic-chip manufacturers around the world. The company was established in 1984 as a joint venture between Philips and ASM International. Philips had developed an internal project for building lithography equipment but did not want to fund the entire effort alone. ASML began with limited market recognition and no commercially proven machine. Its first product, the PAS 2000, was unsuccessful, partly because its wafer-positioning system was unreliable. The company survived through continued support from Philips and developed the PAS 5500, introduced in the early 1990s. That platform became a commercial breakthrough, helped by ASML's modular architecture and emphasis on serviceability, which reduced customer downtime and allowed systems to be upgraded and maintained at production sites. ASML's competitive position strengthened through the 1990s and 2000s as it developed the TWINSCAN dual-stage architecture and expanded its customer base. The company became the largest supplier of photolithography systems in 2002, competing primarily with Nikon and Canon. Its business expanded through acquisitions and partnerships, including the purchase of Silicon Valley Group, BRION Technologies, Cymer, and Hermes Microvision. These transactions added capabilities in lithography, computational lithography, light sources, and metrology or inspection-related technologies. Extreme ultraviolet lithography, or EUV, became the company's defining long-term technology program. ASML began investigating EUV in the late 1990s and worked with chipmakers, research organizations, optics suppliers, and government-supported research programs to overcome the technical problems associated with generating and controlling EUV light. Commercial EUV systems reached the market in the late 2010s and became important for manufacturing advanced logic and memory devices. ASML is the only commercial producer of EUV lithography systems, giving it an unusually strong position in the most advanced segment of the semiconductor-equipment industry. The company operates an international manufacturing, research, service, and supplier network. Its systems combine precision mechanics, optics, software, light sources, vacuum technology, and measurement systems, with many critical components sourced from specialist partners. ASML sells complete scanners and provides installation, upgrades, maintenance, software, and other lifecycle services. Its customers include leading semiconductor foundries and integrated-device manufacturers, while its equipment is used indirectly in products such as processors, memory, communications chips, and advanced electronic systems. ASML is listed on Euronext Amsterdam and Nasdaq under the symbol ASML. Its strategic importance has made it central to debates over semiconductor supply chains, national security, export controls, and technological competition between the United States, China, and other major economies. Since 2023, the Netherlands has imposed increasingly strict licensing requirements on exports of certain advanced chipmaking equipment, affecting the company's ability to sell some systems to China. ASML remains active and internationally oriented, but its commercial opportunities are shaped by government controls as well as by the cyclical and technologically demanding nature of the semiconductor industry.
History
ASML originated in Philips' effort during the 1970s and early 1980s to build lithography equipment in response to the semiconductor industry's demand for smaller and more accurately patterned features. Philips concluded that the project required a separate industrial structure and in 1984 joined with ASM International to create a new company. The joint venture pursued a relatively asset-light and modular model, outsourcing major subsystems while concentrating on system integration, engineering, and customer service. The company's first machine, the PAS 2000, failed commercially and technically. Its wafer stage used an oil-pressure mechanism that was prone to leakage, and ASML had little market presence against established Japanese competitors. Philips considered ending the venture, but continued backing allowed ASML to develop a more competitive platform. ASML became independent and publicly traded in 1988 and adopted ASML as its official name. The PAS 5500, introduced in 1991, was the company's first major commercial success. Its modular design made repairs and upgrades comparatively practical, an advantage that helped win important customers such as IBM and Micron. ASML subsequently competed with Nikon and Canon while expanding the performance and productivity of its systems. In the 1990s it began evaluating extreme ultraviolet lithography and joined government-supported research efforts involving major chipmakers and research institutions. EUV required advances in light generation, reflective optics, contamination control, vacuum systems, and software, and became a multi-decade development program. ASML acquired Silicon Valley Group in 2001 and became the leading supplier of photolithography systems in 2002. Its TWINSCAN dual-stage architecture improved productivity by allowing one wafer stage to be exposed while another was measured or prepared. During the 2000s the company broadened its capabilities through the acquisition of BRION Technologies and intensified investment in next-generation lithography. The global financial crisis caused a significant sales decline in 2008 and led to workforce reductions, but ASML had recovered by 2011. To help finance EUV development, ASML established a customer co-investment program in 2012. Intel, Samsung, and TSMC acquired minority stakes and participated in efforts intended to accelerate development. ASML also acquired Cymer, whose light-source technology was important to EUV, and later acquired Hermes Microvision to strengthen capabilities related to advanced semiconductor manufacturing. Development of 450 mm wafer equipment was paused in 2013 because the timing of customer demand was uncertain. EUV systems moved from research into commercial production during the late 2010s. Their ability to print advanced layers with fewer multiple-patterning steps made them strategically important for leading-edge logic and memory manufacturing. ASML also expanded its component and optical-manufacturing capacity, including through the acquisition of Berliner Glas Group in 2020. The company now combines lithography hardware with software, metrology-related capabilities, installation, upgrades, and long-term service. ASML's importance has increasingly intersected with geopolitics. The United States and the Netherlands have imposed restrictions and licensing requirements on exports of certain ASML systems to China. In 2023, ASML disclosed an alleged theft of confidential information by a former employee in China, while earlier reporting and company disclosures had described other intellectual-property concerns involving Chinese firms. Dutch authorities expanded controls in 2024 and 2025. These developments have made export licensing, intellectual-property protection, and supply-chain resilience central parts of ASML's operating environment.
- 2024Additional Dutch export restrictions are imposed
The Dutch government tightened controls covering additional ASML chipmaking equipment.
- 2023Dutch export controls take effect
The Netherlands introduced licensing requirements for selected advanced semiconductor-manufacturing equipment.
- 2020Berliner Glas Group acquisition is announced
The acquisition expanded ASML's optical-component and manufacturing capacity for its advanced systems.
- 2018United States pressure affects proposed China technology sales
The United States sought to prevent the sale of certain ASML technology to China, linking the company's business to broader technology-security policy.
- 2013Cymer acquisition is completed
ASML added Cymer's lithography light-source expertise to its technology base.
- 2012Customer co-investment program is launched
Intel, Samsung, and TSMC took minority positions or participated in the program to support ASML's substantial EUV research requirements.
- 2002ASML becomes the largest photolithography supplier
The company overtook competitors in the global lithography market, aided by the productivity of its TWINSCAN architecture.
- 2001Silicon Valley Group is acquired
The acquisition expanded ASML's lithography portfolio and supported relationships with major chip manufacturers.
- 1997ASML begins serious EUV research
ASML started investigating extreme ultraviolet lithography as a possible route to future semiconductor scaling.
- 1991PAS 5500 establishes ASML commercially
The PAS 5500 became ASML's first major commercial success and helped it win customers from established competitors.
- 1988ASML becomes independent and publicly traded
The company separated from the joint-venture phase and adopted ASML as its official corporate name.
- 1984ASML is founded as a Philips–ASM International joint venture
The new company was created to commercialize lithography equipment developed from a Philips internal project.
Products and positioning
High-end semiconductor manufacturing equipment, with a technology leadership position in advanced lithography.
EUV lithography systemsExtreme ultraviolet lithography
EUV systems use extremely short-wavelength light and reflective optical technology to print some of the smallest features required in advanced semiconductor manufacturing. They are used for leading-edge logic and memory layers and require highly specialized light sources, optics, vacuum systems, wafer stages, sensors, and control software. ASML is the sole commercial supplier of EUV lithography systems.
TWINSCAN DUV systemsDeep ultraviolet lithography
TWINSCAN platforms use a dual-stage architecture designed to increase productivity by coordinating wafer exposure and measurement operations. DUV systems support a broad range of semiconductor layers, including applications that do not require EUV and production processes in mature and advanced nodes. Their modular construction also supports field servicing, upgrades, and extended operating life.
PAS 5500Historical DUV lithography1991
The PAS 5500 was ASML's first major commercial breakthrough. Introduced in the early 1990s, it competed successfully against established Japanese lithography systems by emphasizing modularity, repairability, and customer uptime. The platform helped transform ASML from an uncertain joint venture into a credible global supplier.
Computational lithography and process-control softwareSoftware and process control
ASML supplies software and computational capabilities that help customers model, optimize, and control lithography processes. These tools compensate for optical and process effects, improve pattern fidelity, and support the operation of complex scanners. The company's software capabilities were strengthened through the acquisition of BRION Technologies.
Service, upgrades, and supportLifecycle services
ASML supports installed systems through installation, maintenance, spare parts, software updates, productivity improvements, and hardware upgrades. These services are important because lithography systems are expensive, technically complex assets that remain in semiconductor fabs for many years.
Flagship businesses
- EUV lithography systems
- TWINSCAN lithography platforms
- DUV immersion lithography systems
Brand decisions
- 2023Compliance with expanded Dutch export controlsOther
The Netherlands introduced national-security controls affecting exports of advanced semiconductor-manufacturing equipment to China.
What changed. ASML began operating under Dutch export-license requirements for specified systems and customers.
Aftermath. The controls constrained some China-related sales and made government licensing a permanent strategic factor in ASML's international operations.
- 2013Pause of 450 mm wafer-equipment developmentStrategy
The timing of demand for 450 mm wafer manufacturing became uncertain.
What changed. ASML paused development of 450 mm lithography equipment.
Aftermath. The decision allowed the company and its customers to concentrate resources on technologies with clearer near-term demand, particularly EUV and 300 mm production.
- 2012Launch of the customer co-investment programStrategy
EUV development required very large and sustained research spending, while leading chipmakers needed the technology to remain on advanced manufacturing roadmaps.
What changed. ASML offered minority equity participation and research cooperation opportunities to major customers including Intel, Samsung, and TSMC.
Aftermath. The program provided capital and closer technical collaboration during the period in which ASML moved EUV from research toward commercial production.
- 2012Acquisition of CymerM&A
EUV and advanced DUV systems depend on specialized light-source technology.
What changed. ASML announced and subsequently completed the acquisition of Cymer, bringing a major light-source capability into the company.
Aftermath. The transaction strengthened ASML's vertical technology position in lithography light sources and supported its EUV roadmap.
Controversies
- 2023Alleged theft of ASML technology information in ChinaControversy
ASML disclosed that a former employee in China allegedly obtained confidential information about the company's technology. The report intensified existing concerns about intellectual-property protection and industrial espionage in the semiconductor-equipment sector.
- 2015Software subsidiary intellectual-property theft caseControversy
ASML reported that employees connected with its Silicon Valley software subsidiary had taken confidential information. The dispute later resulted in a damages award reported at approximately $223 million and involved claims concerning the use of proprietary information.
Recent events
- 2025Dutch export-control responsibilities are expanded
Further restrictions reportedly required ASML to seek export licenses from the Dutch government for affected equipment rather than relying on the previous licensing arrangement involving the United States.
Regulation - 2024The Netherlands tightens controls on additional ASML equipment
Dutch authorities expanded export controls on selected ASML chipmaking systems, aligning the Netherlands more closely with restrictions intended to limit access to advanced semiconductor technology.
Regulation - 2023The Netherlands introduces export-license requirements for advanced chip equipment
The Dutch government introduced controls requiring licenses for exports of certain advanced semiconductor-manufacturing equipment. The policy directly affected ASML's ability to ship specified systems to China.
RegulationOther - 2013ASML completes acquisition of Cymer
ASML completed its acquisition of Cymer, a specialist in lithography light sources. The transaction strengthened ASML's control over an important technology area for the development and production of EUV systems.
M&A
Sources
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